Kenji Yumiba

Follow

Person

Kamisato, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Cleaning equipment and cleaning method of deposition mask
- Patent number 8,182,610
- Issue date May 22, 2012
- Hitachi High-Technologies Corporation
- Yoichi Takahara
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CLEANING EQUIPMENT AND CLEANING METHOD OF DEPOSITION MASK
- Publication number 20100101601
- Publication date Apr 29, 2010
- Yoichi TAKAHARA
- H01 - BASIC ELECTRIC ELEMENTS