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Kenro Kitamura
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Fujisawa, JP
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last 30 patents
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Patent Grant
Positive resist polymer composition and method of forming resist pa...
Patent number
4,345,020
Issue date
Aug 17, 1982
Fujitsu Limited
Yasuhiro Yoneda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Positive resist terpolymer composition and method of forming resist...
Patent number
4,276,365
Issue date
Jun 30, 1981
Fujitsu Limited
Yasuhiro Yoneda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Positive resist terpolymer composition and method of forming resist...
Patent number
4,273,856
Issue date
Jun 16, 1981
Fujitsu Limited
Yasuhiro Yoneda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Negative type deep ultraviolet resist
Patent number
4,267,258
Issue date
May 12, 1981
Fujitsu Limited
Yasuhiro Yoneda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY