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Asan-si, KR
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Patents Grants
last 30 patents
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Patent Grant
Fluid supply apparatus and substrate processing apparatus including...
Patent number
11,623,853
Issue date
Apr 11, 2023
Samsung Electronics Co., Ltd.
Kibeom Kil
B67 - OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS LIQUID...
Patents Applications
last 30 patents
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Patent Application
FLUID SUPPLY APPARATUS AND SUBSTRATE PROCESSING APPARATUS INCLUDING...
Publication number
20220396380
Publication date
Dec 15, 2022
Samsung Electronics Co., Ltd.
Kibeom KIL
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL