Kiyoshi Awai

Person

  • Hiratsuka, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Film deposition method for forming copper film

    • Patent number 6,220,204
    • Issue date Apr 24, 2001
    • Sumitomo Heavy Industries, Ltd.
    • Hiroyuki Makino
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...