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Laure Elisa Carbonell
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Montlhery, FR
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last 30 patents
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Patent Grant
Formation of deep via airgaps for three dimensional wafer to wafer...
Patent number
7,338,896
Issue date
Mar 4, 2008
Interuniversitair Microelektronica Centrum (IMEC)
Serge Vanhaelemeersch
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Formation of deep via airgaps for three dimensional wafer to wafer...
Publication number
20060223301
Publication date
Oct 5, 2006
Serge Vanhaelemeersch
H01 - BASIC ELECTRIC ELEMENTS