Makoto Saito

Person

Nomi Ishikawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Gas supply member, plasma processing apparatus, and method for form...
- Patent number 11,164,726
- Issue date Nov 2, 2021
- TOSHIBA MEMORY CORPORATION
- Tetsuyuki Matsumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon carbide member for plasma processing apparatus
- Patent number 10,280,121
- Issue date May 7, 2019
- HOKURIKU SEIKEI INDUSTRIAL CO., LTD.
- Masahiro Okesaku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck and semiconductor manufacturing apparatus
- Patent number 10,276,420
- Issue date Apr 30, 2019
- Kabushiki Kaisha Toshiba
- Shinya Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing light emitting diode device
- Patent number 9,991,421
- Issue date Jun 5, 2018
- Kabushiki Kaisha Toshiba
- Ikuo Uematsu
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Electrostatic chuck, mount plate support, and manufacturing method...
- Patent number 9,370,920
- Issue date Jun 21, 2016
- Kabushiki Kaisha Toshiba
- Hideo Eto
- B32 - LAYERED PRODUCTS
Information Patent Grant
Electrostatic chuck, mount plate support, and manufacturing method...
- Patent number 9,248,635
- Issue date Feb 2, 2016
- Kabushiki Kaisha Toshiba
- Hideo Eto
- B32 - LAYERED PRODUCTS
Information Patent Grant
Gas supply member, plasma treatment method, and method of forming y...
- Patent number 9,236,229
- Issue date Jan 12, 2016
- Kabushiki Kaisha Toshiba
- Hideo Eto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Seal member, etching apparatus, and a method of manufacturing a sem...
- Patent number 9,111,969
- Issue date Aug 18, 2015
- Kabushiki Kaisha Toshiba
- Hideo Eto
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Pressure controlling apparatus
- Patent number 8,833,388
- Issue date Sep 16, 2014
- Kabushiki Kaisha Toshiba
- Hideo Eto
- G05 - CONTROLLING REGULATING
Information Patent Grant
Power supply control device, plasma processing device, and plasma p...
- Patent number 8,760,053
- Issue date Jun 24, 2014
- Kabushiki Kaisha Toshiba
- Hideo Eto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Flow sensor, mass flow controller, and method for manufacturing flo...
- Patent number 8,689,623
- Issue date Apr 8, 2014
- Kabushiki Kaisha Toshiba
- Hideo Eto
- G05 - CONTROLLING REGULATING
Information Patent Grant
Mass flow controller, mass flow controller system, substrate proces...
- Patent number 8,651,135
- Issue date Feb 18, 2014
- Kabushiki Kaisha Toshiba
- Hideo Eto
- G05 - CONTROLLING REGULATING
Information Patent Grant
Ink jet head having a nozzle plate
- Patent number 6,767,078
- Issue date Jul 27, 2004
- Kabushiki Kaisha Toshiba
- Akira Sato
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Dry processing apparatus and dry processing method
- Patent number 6,402,847
- Issue date Jun 11, 2002
- Kabushiki Kaisha Toshiba
- Shigeyuki Takagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
GAS SUPPLY MEMBER, PLASMA PROCESSING APPARATUS, AND METHOD FOR FORM...
- Publication number 20200258719
- Publication date Aug 13, 2020
- Toshiba Memory Corporation
- Tetsuyuki MATSUMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON CARBIDE MEMBER FOR PLASMA PROCESSING APPARATUS, AND PRODUCT...
- Publication number 20180072629
- Publication date Mar 15, 2018
- HOKURIKU SEIKEI INDUSTRIAL CO., LTD.
- Masahiro OKESAKU
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
ELECTROSTATIC CHUCK AND SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20180076080
- Publication date Mar 15, 2018
- Kabushiki Kaisha Toshiba
- Shinya ITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING LIGHT EMITTING DIODE DEVICE
- Publication number 20180026159
- Publication date Jan 25, 2018
- KABUSHIKI KAISHA TOSHIBA
- Ikuo UEMATSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VALVE AND SEMICONDUCTOR MANUFACTURING EQUIPMENT
- Publication number 20170067564
- Publication date Mar 9, 2017
- Kabushiki Kaisha Toshiba
- Eiichi Nagumo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
UPPER ELECTRODE, EDGE RING, AND PLASMA PROCESSING APPARATUS
- Publication number 20160284522
- Publication date Sep 29, 2016
- KABUSHIKI KAISHA TOSHIBA
- Hideo ETO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS AND DEPOSITION METHOD
- Publication number 20160273110
- Publication date Sep 22, 2016
- Kabushiki Kaisha Toshiba
- Hiroshi Sanda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND CONTROL METHOD
- Publication number 20150143146
- Publication date May 21, 2015
- KABUSHIKI KAISHA TOSHIBA
- Hideo ETO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ELECTROSTATIC CHUCK, MOUNT PLATE SUPPORT, AND MANUFACTURING METHOD...
- Publication number 20150043122
- Publication date Feb 12, 2015
- KABUSHIKI KAISHA TOSHIBA
- Hideo ETO
- B32 - LAYERED PRODUCTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20140231018
- Publication date Aug 21, 2014
- KABUSHIKI KAISHA TOSHIBA
- Yoshifumi AOKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS SUPPLY MEMBER, PLASMA PROCESSING APPARATUS AND METHOD OF FABRIC...
- Publication number 20140231251
- Publication date Aug 21, 2014
- KABUSHIKI KAISHA TOSHIBA
- Hisashi Hashiguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRODE FOR PLASMA PROCESSING APPARATUS, METHOD FOR MANUFACTURING...
- Publication number 20140217891
- Publication date Aug 7, 2014
- KABUSHIKI KAISHA TOSHIBA
- Hideo ETO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEAL MEMBER, ETCHING APPARATUS, AND A METHOD OF MANUFACTURING A SEM...
- Publication number 20130330929
- Publication date Dec 12, 2013
- Kabushiki Kaisha Toshiba
- Hideo ETO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING DEVICE AND FOCUS RING
- Publication number 20130168020
- Publication date Jul 4, 2013
- Kabushiki Kaisha Toshiba
- Hisashi HASHIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLOW SENSOR, MASS FLOW CONTROLLER, AND METHOD FOR MANUFACTURING FLO...
- Publication number 20130074593
- Publication date Mar 28, 2013
- Kabushiki Kaisha Toshiba
- Hideo ETO
- G01 - MEASURING TESTING
Information Patent Application
COAXIAL CABLE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20130008603
- Publication date Jan 10, 2013
- Kabushiki Kaisha Toshiba
- Hideo Eto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA TREATMENT APPARATUS
- Publication number 20120247667
- Publication date Oct 4, 2012
- Kabushiki Kaisha Toshiba
- Hisashi HASHIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRESSURE CONTROLLING APPARATUS
- Publication number 20120227830
- Publication date Sep 13, 2012
- Kabushiki Kaisha Toshiba
- Hideo Eto
- G05 - CONTROLLING REGULATING
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20120216955
- Publication date Aug 30, 2012
- TOSHIBA MATERIALS CO., LTD.
- Hideo ETO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROTECTIVE FILM, METHOD FOR FORMING THE SAME, SEMICONDUCTOR MANUFAC...
- Publication number 20120040132
- Publication date Feb 16, 2012
- Kabushiki Kaisha Toshiba
- Hideo ETO
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
GAS SUPPLY MEMBER, PLASMA TREATMENT METHOD, AND METHOD OF FORMING Y...
- Publication number 20120037596
- Publication date Feb 16, 2012
- Hideo ETO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POWER SUPPLY CONTROL DEVICE, PLASMA PROCESSING DEVICE, AND PLASMA P...
- Publication number 20120038277
- Publication date Feb 16, 2012
- Hideo ETO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA TREATMENT APPARATUS AND PLASMA TREATMENT METHOD
- Publication number 20120000887
- Publication date Jan 5, 2012
- Kabushiki Kaisha Toshiba
- Hideo Eto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MASS FLOW CONTROLLER, MASS FLOW CONTROLLER SYSTEM, SUBSTRATE PROCES...
- Publication number 20120000542
- Publication date Jan 5, 2012
- Kabushiki Kaisha Toshiba
- Hideo ETO
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD OF MANUFACTURING OXIDE FILM AND METHOD OF MANUFACTURING SEMI...
- Publication number 20080214019
- Publication date Sep 4, 2008
- Kabushiki Kaisha Toshiba
- Hiroshi Katsumata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of manufacturing oxide film and method of manufacturing semi...
- Publication number 20060068605
- Publication date Mar 30, 2006
- Kabushiki Kaisha Toshiba
- Hiroshi Katsumata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ink jet head manufacturing method, ink jet head, ink applying appar...
- Publication number 20030030696
- Publication date Feb 13, 2003
- Akira Sato
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS

Makoto Saito

Person

Patents Grantslast 30 patents

Gas supply member, plasma processing apparatus, and method for form...

Silicon carbide member for plasma processing apparatus

Electrostatic chuck and semiconductor manufacturing apparatus

Method for manufacturing light emitting diode device

Electrostatic chuck, mount plate support, and manufacturing method...

Electrostatic chuck, mount plate support, and manufacturing method...

Gas supply member, plasma treatment method, and method of forming y...

Seal member, etching apparatus, and a method of manufacturing a sem...

Pressure controlling apparatus

Power supply control device, plasma processing device, and plasma p...

Flow sensor, mass flow controller, and method for manufacturing flo...

Mass flow controller, mass flow controller system, substrate proces...

Ink jet head having a nozzle plate

Dry processing apparatus and dry processing method

Patents Applicationslast 30 patents

GAS SUPPLY MEMBER, PLASMA PROCESSING APPARATUS, AND METHOD FOR FORM...

SILICON CARBIDE MEMBER FOR PLASMA PROCESSING APPARATUS, AND PRODUCT...

ELECTROSTATIC CHUCK AND SEMICONDUCTOR MANUFACTURING APPARATUS

METHOD FOR MANUFACTURING LIGHT EMITTING DIODE DEVICE

VALVE AND SEMICONDUCTOR MANUFACTURING EQUIPMENT

UPPER ELECTRODE, EDGE RING, AND PLASMA PROCESSING APPARATUS

DEPOSITION APPARATUS AND DEPOSITION METHOD

SUBSTRATE PROCESSING APPARATUS AND CONTROL METHOD

ELECTROSTATIC CHUCK, MOUNT PLATE SUPPORT, AND MANUFACTURING METHOD...

PLASMA PROCESSING APPARATUS

GAS SUPPLY MEMBER, PLASMA PROCESSING APPARATUS AND METHOD OF FABRIC...

ELECTRODE FOR PLASMA PROCESSING APPARATUS, METHOD FOR MANUFACTURING...

SEAL MEMBER, ETCHING APPARATUS, AND A METHOD OF MANUFACTURING A SEM...

ETCHING DEVICE AND FOCUS RING

FLOW SENSOR, MASS FLOW CONTROLLER, AND METHOD FOR MANUFACTURING FLO...

COAXIAL CABLE AND SUBSTRATE PROCESSING APPARATUS

PLASMA TREATMENT APPARATUS

PRESSURE CONTROLLING APPARATUS

PLASMA PROCESSING APPARATUS

PROTECTIVE FILM, METHOD FOR FORMING THE SAME, SEMICONDUCTOR MANUFAC...

GAS SUPPLY MEMBER, PLASMA TREATMENT METHOD, AND METHOD OF FORMING Y...

POWER SUPPLY CONTROL DEVICE, PLASMA PROCESSING DEVICE, AND PLASMA P...

PLASMA TREATMENT APPARATUS AND PLASMA TREATMENT METHOD

MASS FLOW CONTROLLER, MASS FLOW CONTROLLER SYSTEM, SUBSTRATE PROCES...

METHOD OF MANUFACTURING OXIDE FILM AND METHOD OF MANUFACTURING SEMI...

Method of manufacturing oxide film and method of manufacturing semi...

Ink jet head manufacturing method, ink jet head, ink applying appar...