Marcel KOLLBERG

Person

Wurselen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Susceptor arrangement of a CVD reactor
- Patent number 12,110,591
- Issue date Oct 8, 2024
- Aixtron SE
- Francisco Ruda Y Witt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing a component part of a CVD reactor
- Patent number 12,098,462
- Issue date Sep 24, 2024
- Aixtron SE
- Marcel Kollberg
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Closure element for closing a loading opening of an inner housing o...
- Patent number 11,702,740
- Issue date Jul 18, 2023
- Aixtron SE
- Marcel Kollberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for deposition of a III-V semiconductor layer
- Patent number 11,286,566
- Issue date Mar 29, 2022
- Aixtron SE
- Francisco Ruda Y Witt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coated flat component in a CVD reactor
- Patent number 11,053,586
- Issue date Jul 6, 2021
- Aixtron SE
- Marcel Kollberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD reactor and method for cleaning a CVD reactor
- Patent number 10,883,171
- Issue date Jan 5, 2021
- Aixtron SE
- Marcel Kollberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CVD REACTOR WITH A SUPPORTING RING, AND SUPPORTING RING FOR A SUBST...
- Publication number 20240392441
- Publication date Nov 28, 2024
- AIXTRON SE
- Jared Lee HOLZWARTH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WALL-COOLED GAS-INLET ELEMENT FOR A CVD REACTOR
- Publication number 20220396877
- Publication date Dec 15, 2022
- AIXTRON SE
- Marcel KOLLBERG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUSCEPTOR ARRANGEMENT OF A CVD REACTOR
- Publication number 20220186374
- Publication date Jun 16, 2022
- AIXTRON SE
- Francisco RUDA Y WITT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING A COMPONENT PART OF A CVD REACTOR
- Publication number 20220033965
- Publication date Feb 3, 2022
- AIXTRON SE
- Marcel KOLLBERG
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
CLOSURE ELEMENT FOR CLOSING A LOADING OPENING OF AN INNER HOUSING O...
- Publication number 20200318235
- Publication date Oct 8, 2020
- AIXTRON SE
- Marcel KOLLBERG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR DEPOSITION OF A III-V SEMICONDUCTOR LAYER
- Publication number 20190264323
- Publication date Aug 29, 2019
- AIXTRON SE
- Francisco RUDA Y WITT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CVD REACTOR AND METHOD FOR CLEANING A CVD REACTOR
- Publication number 20190226082
- Publication date Jul 25, 2019
- AIXTRON SE
- Marcel KOLLBERG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATED FLAT COMPONENT IN A CVD REACTOR
- Publication number 20170152598
- Publication date Jun 1, 2017
- AIXTRON SE
- Marcel KOLLBERG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR DEPOSITION OF A III-V SEMICONDUCTOR LAYER
- Publication number 20160225619
- Publication date Aug 4, 2016
- AIXTRON SE
- Francisco RUDA Y WITT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE FOR ORIENTING A WAFER ON A WAFER CARRIER
- Publication number 20150303091
- Publication date Oct 22, 2015
- AIXTRON SE
- Francisco RUDA Y WITT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING DEVICE AND METHOD FOR OPERATING A COATING DEVICE HAVING A S...
- Publication number 20130040054
- Publication date Feb 14, 2013
- AIXTRON SE
- Gerhard Karl Strauch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Marcel KOLLBERG

Person

Patents Grantslast 30 patents

Susceptor arrangement of a CVD reactor

Method for producing a component part of a CVD reactor

Closure element for closing a loading opening of an inner housing o...

Apparatus for deposition of a III-V semiconductor layer

Coated flat component in a CVD reactor

CVD reactor and method for cleaning a CVD reactor

Patents Applicationslast 30 patents

CVD REACTOR WITH A SUPPORTING RING, AND SUPPORTING RING FOR A SUBST...

WALL-COOLED GAS-INLET ELEMENT FOR A CVD REACTOR

SUSCEPTOR ARRANGEMENT OF A CVD REACTOR

METHOD FOR PRODUCING A COMPONENT PART OF A CVD REACTOR

CLOSURE ELEMENT FOR CLOSING A LOADING OPENING OF AN INNER HOUSING O...

APPARATUS FOR DEPOSITION OF A III-V SEMICONDUCTOR LAYER

CVD REACTOR AND METHOD FOR CLEANING A CVD REACTOR

COATED FLAT COMPONENT IN A CVD REACTOR

METHOD AND APPARATUS FOR DEPOSITION OF A III-V SEMICONDUCTOR LAYER

DEVICE FOR ORIENTING A WAFER ON A WAFER CARRIER

COATING DEVICE AND METHOD FOR OPERATING A COATING DEVICE HAVING A S...