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Martin Bring
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Langebruck, DE
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last 30 patents
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Patent Grant
Method of manufacturing monocrystalline silicon micromirrors
Patent number
7,981,303
Issue date
Jul 19, 2011
Micronic Mydata AB
Martin Bring
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
NOVEL MONOCRYSTALLINE SILICON MICROMIRRORS FOR MASKLESS LITHOGRAPHY
Publication number
20090080097
Publication date
Mar 26, 2009
Martin Bring
B81 - MICRO-STRUCTURAL TECHNOLOGY