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Masahiro Yasumi
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Ibaraki-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Vibration-type piezoelectric acceleration sensor element and vibrat...
Patent number
7,168,321
Issue date
Jan 30, 2007
Matsushita Electric Industrial Co., Ltd.
Jiro Terada
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
Vibration-type piezoelectric acceleration sensor element and vibrat...
Publication number
20060236763
Publication date
Oct 26, 2006
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
Jiro Terada
B81 - MICRO-STRUCTURAL TECHNOLOGY