Masao Saitoh

Person

  • Fujisawa, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Chemical vapor deposition apparatus and cleaning method thereof

    • Patent number 6,312,569
    • Issue date Nov 6, 2001
    • Ebara Corporation
    • Hidenao Suzuki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Reactant gas ejector head

    • Patent number 5,950,925
    • Issue date Sep 14, 1999
    • Ebara Corporation
    • Yukio Fukunaga
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...