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Masao Saitoh
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Fujisawa, JP
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last 30 patents
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Patent Grant
Chemical vapor deposition apparatus and cleaning method thereof
Patent number
6,312,569
Issue date
Nov 6, 2001
Ebara Corporation
Hidenao Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Reactant gas ejector head
Patent number
5,950,925
Issue date
Sep 14, 1999
Ebara Corporation
Yukio Fukunaga
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...