Membership
Tour
Register
Log in
Masashi Kuriyama
Follow
Person
Yokosuka-shi, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Impurity-doped layer formation apparatus and electrostatic chuck pr...
Patent number
9,312,163
Issue date
Apr 12, 2016
Sumitomo Heavy Industries, Ltd.
Masaru Tanaka
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
Information
Patent Application
IMPURITY-DOPED LAYER FORMATION APPARATUS AND ELECTROSTATIC CHUCK PR...
Publication number
20130019797
Publication date
Jan 24, 2013
SEN Corporation
Masaru Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA DOPING APPARATUS AND PLASMA DOPING METHOD
Publication number
20120015507
Publication date
Jan 19, 2012
SEN Corporation
Masaru Tanaka
H01 - BASIC ELECTRIC ELEMENTS