Masatoshi Hayashi

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Matsusaka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Cleaning method and cleaning apparatus
- Patent number 6,279,590
- Issue date Aug 28, 2001
- Sharp Kabushiki Kaisha
- Tohru Okuda
- B08 - CLEANING
Information Patent Grant
Method of cleaning a substrate in a cleaning tank using plural flui...
- Patent number 6,132,523
- Issue date Oct 17, 2000
- Sharp Kabushiki Kaisha
- Tohru Okuda
- B08 - CLEANING