Matthew M. Besen

Person

Andover, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Laser-driven light source with electrodeless ignition
- Patent number 12,176,200
- Issue date Dec 24, 2024
- Hamamatsu Photonics K.K.
- Matthew Partlow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inductively coupled plasma light source with switched power supply
- Patent number 12,156,322
- Issue date Nov 26, 2024
- Hamamatsu Photonics K.K.
- Frederick Marvin Niell
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
All-optical laser-driven light source with electrodeless ignition
- Patent number 12,144,072
- Issue date Nov 12, 2024
- Hamamatsu Photonics K.K.
- Matthew Partlow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser-driven light source with electrodeless ignition
- Patent number 12,014,918
- Issue date Jun 18, 2024
- Hamamatsu Photonics K.K.
- Matthew Partlow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser-driven light source with electrodeless ignition
- Patent number 11,784,037
- Issue date Oct 10, 2023
- Hamamatsu Photonics K.K.
- Matthew Partlow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser-driven light source with electrodeless ignition
- Patent number 11,587,781
- Issue date Feb 21, 2023
- Hamamatsu Photonics K.K.
- Matthew Partlow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rotary anode unit and X-ray generation apparatus
- Patent number 11,183,356
- Issue date Nov 23, 2021
- ENERGETIQ TECHNOLOGY, INC.
- Matthew M. Besen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
X-ray generation apparatus
- Patent number 11,164,713
- Issue date Nov 2, 2021
- ENERGETIQ TECHNOLOGY, INC.
- Matthew M. Besen
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Laser-driven light source
- Patent number 8,525,138
- Issue date Sep 3, 2013
- Energetiq Technology, Inc.
- Donald K. Smith
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Laser-heated infrared source
- Patent number 8,173,986
- Issue date May 8, 2012
- Energetiq Technology, Inc.
- William M. Holber
- G01 - MEASURING TESTING
Information Patent Grant
Method for inductively-driven plasma light source
- Patent number 8,143,790
- Issue date Mar 27, 2012
- Energetiq Technology, Inc.
- Donald K. Smith
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Inductively-driven plasma light source
- Patent number 7,948,185
- Issue date May 24, 2011
- Energetiq Technology Inc.
- Donald K. Smith
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Pulsed mass flow delivery system and method
- Patent number 7,829,353
- Issue date Nov 9, 2010
- MKS Instruments, Inc.
- Ali Shajii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Toroidal low-field reactive gas and plasma source having a dielectr...
- Patent number 7,659,489
- Issue date Feb 9, 2010
- MKS Instruments, Inc.
- William M. Holber
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pulsed mass flow delivery system and method
- Patent number 7,628,860
- Issue date Dec 8, 2009
- MKS Instruments, Inc.
- Ali Shajii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pulsed mass flow delivery system and method
- Patent number 7,615,120
- Issue date Nov 10, 2009
- MKS Instruments, Inc.
- Ali Shajii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Inductively-driven plasma light source
- Patent number 7,569,791
- Issue date Aug 4, 2009
- Energetiq Technology, Inc.
- Donald K. Smith
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Toroidal low-field reactive gas and plasma source having a dielectr...
- Patent number 7,501,600
- Issue date Mar 10, 2009
- MKS Instruments, Inc.
- William M. Holber
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inductively-driven plasma light source
- Patent number 7,307,375
- Issue date Dec 11, 2007
- Energetiq Technology Inc.
- Donald K. Smith
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for fluorine generation and recirculation
- Patent number 7,238,266
- Issue date Jul 3, 2007
- MKS Instruments, Inc.
- Donald K. Smith
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Inductively-driven light source for lithography
- Patent number 7,199,384
- Issue date Apr 3, 2007
- Energetiq Technology Inc.
- Donald K. Smith
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Inductively-driven light source for microscopy
- Patent number 7,183,717
- Issue date Feb 27, 2007
- Energetiq Technology Inc.
- Donald K. Smith
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Porous valve assembly
- Patent number 7,073,771
- Issue date Jul 11, 2006
- MKS Instruments, Inc.
- Ali Shajii
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Toroidal low-field reactive gas and plasma source having a dielectr...
- Patent number 6,872,909
- Issue date Mar 29, 2005
- Applied Science and Technology, Inc.
- William M. Holber
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion storage system
- Patent number 6,781,119
- Issue date Aug 24, 2004
- MKS Instruments, Inc.
- Donald K. Smith
- G01 - MEASURING TESTING
Information Patent Grant
Radial flow turbomolecular vacuum pump
- Patent number 6,508,631
- Issue date Jan 21, 2003
- MKS Instruments, Inc.
- Donald K. Smith
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Microwave plasma deposition source and method of filling high aspec...
- Patent number 5,688,382
- Issue date Nov 18, 1997
- Applied Science & Technology, Inc.
- Matthew M. Besen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ozone and other reactive gas generator cell and system
- Patent number 5,637,279
- Issue date Jun 10, 1997
- Applied Science & Technology, Inc.
- Matthew M. Besen
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Microwave plasma applicator with a helical fluid cooling channel su...
- Patent number 5,625,259
- Issue date Apr 29, 1997
- Applied Science & Technology, Inc.
- William M. Holber
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Fluid-cooled dielectric window for a plasma system
- Patent number 5,568,015
- Issue date Oct 22, 1996
- Applied Science & Technology, Inc.
- William M. Holber
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Inductively Coupled Plasma Light Source with Switched Power Supply
- Publication number 20250056705
- Publication date Feb 13, 2025
- Hamamatsu Photonics K. K.
- Frederick Marvin Niell
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
All-Optical Laser-Driven Light Source with Electrodeless Ignition
- Publication number 20250040004
- Publication date Jan 30, 2025
- Hamamatsu Photonics K. K.
- Matthew Partlow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Laser-Driven Light Source with Electrodeless Ignition
- Publication number 20240297035
- Publication date Sep 5, 2024
- HAMAMATSU PHOTONICS K. K.
- Matthew Partlow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inductively Coupled Plasma Light Source with Switched Power Supply
- Publication number 20240196506
- Publication date Jun 13, 2024
- Hamamatsu Photonics K. K.
- Frederick Marvin Niell
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Laser-Driven Light Source with Electrodeless Ignition
- Publication number 20230420242
- Publication date Dec 28, 2023
- Hamamatsu Photonics K. K.
- Matthew Partlow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
All-Optical Laser-Driven Light Source with Electrodeless Ignition
- Publication number 20230319959
- Publication date Oct 5, 2023
- Hamamatsu Photonics K. K.
- Matthew Partlow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Laser-Driven Light Source with Electrodeless Ignition
- Publication number 20230178357
- Publication date Jun 8, 2023
- HAMAMATSU PHOTONICS K. K.
- Matthew Partlow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Laser-Driven Light Source with Electrodeless Ignition
- Publication number 20220375740
- Publication date Nov 24, 2022
- Hamamatsu Photonics K. K.
- Matthew Partlow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
X-RAY GENERATION APPARATUS
- Publication number 20210305003
- Publication date Sep 30, 2021
- ENERGETIQ TECHNOLOGY, INC.
- Matthew M. BESEN
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
ROTARY ANODE UNIT AND X-RAY GENERATION APPARATUS
- Publication number 20210305004
- Publication date Sep 30, 2021
- ENERGETIQ TECHNOLOGY, INC.
- Matthew M. BESEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Laser-Driven Light Source
- Publication number 20110181191
- Publication date Jul 28, 2011
- Energetiq Technology, Inc.
- Donald K. Smith
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
Laser-Heated Infrared Source
- Publication number 20110127450
- Publication date Jun 2, 2011
- Energetiq Technology, Inc.
- William M. Holber
- G01 - MEASURING TESTING
Information Patent Application
Inventory control and communication system
- Publication number 20080183599
- Publication date Jul 31, 2008
- VISIBLE INVENTORY, INC.
- Gordon W. Hill
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Inductively-Driven Plasma Light Source
- Publication number 20080042591
- Publication date Feb 21, 2008
- Energetiq Technology Inc.
- Donald K. Smith
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Inductively-driven plasma light source
- Publication number 20070210717
- Publication date Sep 13, 2007
- Energetiq Technology Inc.
- Donald K. Smith
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Toroidal Low-Field Reactive Gas and Plasma Source Having a Dielectr...
- Publication number 20070145023
- Publication date Jun 28, 2007
- MKS Instruments, Inc.
- William M. Holber
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inductively-driven plasma light source
- Publication number 20070075053
- Publication date Apr 5, 2007
- Energetiq Technology, Inc.
- Donald K. Smith
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
Pulsed mass flow delivery system and method
- Publication number 20070039549
- Publication date Feb 22, 2007
- MKS Instruments, Inc.
- Ali Shajii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Pulsed mass flow delivery system and method
- Publication number 20070039550
- Publication date Feb 22, 2007
- MKS Instruments, Inc.
- Ali Shajii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Pulsed mass flow delivery system and method
- Publication number 20070042508
- Publication date Feb 22, 2007
- MKS Instruments, Inc.
- Ali Shajii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Isolation valve for energetic and high temperature gases
- Publication number 20060249702
- Publication date Nov 9, 2006
- Matthew M. Besen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Parallel plate valve assembly
- Publication number 20060214127
- Publication date Sep 28, 2006
- Ali Shajii
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Inductively-driven plasma light source
- Publication number 20060017387
- Publication date Jan 26, 2006
- Energetiq Technology Inc.
- Donald K. Smith
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Inductively-driven light source for lithography
- Publication number 20060006345
- Publication date Jan 12, 2006
- Energetig Technology Inc.
- Donald K. Smith
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Inductively-driven plasma light source
- Publication number 20060006775
- Publication date Jan 12, 2006
- Energetiq Technology Inc.
- Donald K. Smith
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Inductively-driven light source for microscopy
- Publication number 20060006808
- Publication date Jan 12, 2006
- Energetiq Technology Inc.
- Donald K. Smith
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Pulsed mass flow delivery system and method
- Publication number 20050223979
- Publication date Oct 13, 2005
- Ali Shajii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POROUS VALVE ASSEMBLY
- Publication number 20050218361
- Publication date Oct 6, 2005
- Ali Shajii
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Toroidal low-field reactive gas and plasma source having a dielectr...
- Publication number 20050145173
- Publication date Jul 7, 2005
- MKS Instruments, Inc.
- William M. Holber
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Flow control valve with magnetic field sensor
- Publication number 20040246649
- Publication date Dec 9, 2004
- MKS Instruments, Inc.
- Matthew M. Besen
- H01 - BASIC ELECTRIC ELEMENTS

Matthew M. Besen

Person

Patents Grantslast 30 patents

Laser-driven light source with electrodeless ignition

Inductively coupled plasma light source with switched power supply

All-optical laser-driven light source with electrodeless ignition

Laser-driven light source with electrodeless ignition

Laser-driven light source with electrodeless ignition

Laser-driven light source with electrodeless ignition

Rotary anode unit and X-ray generation apparatus

X-ray generation apparatus

Laser-driven light source

Laser-heated infrared source

Method for inductively-driven plasma light source

Inductively-driven plasma light source

Pulsed mass flow delivery system and method

Toroidal low-field reactive gas and plasma source having a dielectr...

Pulsed mass flow delivery system and method

Pulsed mass flow delivery system and method

Inductively-driven plasma light source

Toroidal low-field reactive gas and plasma source having a dielectr...

Inductively-driven plasma light source

Method and apparatus for fluorine generation and recirculation

Inductively-driven light source for lithography

Inductively-driven light source for microscopy

Porous valve assembly

Toroidal low-field reactive gas and plasma source having a dielectr...

Ion storage system

Radial flow turbomolecular vacuum pump

Microwave plasma deposition source and method of filling high aspec...

Ozone and other reactive gas generator cell and system

Microwave plasma applicator with a helical fluid cooling channel su...

Fluid-cooled dielectric window for a plasma system

Patents Applicationslast 30 patents

Inductively Coupled Plasma Light Source with Switched Power Supply

All-Optical Laser-Driven Light Source with Electrodeless Ignition

Laser-Driven Light Source with Electrodeless Ignition

Inductively Coupled Plasma Light Source with Switched Power Supply

Laser-Driven Light Source with Electrodeless Ignition

All-Optical Laser-Driven Light Source with Electrodeless Ignition

Laser-Driven Light Source with Electrodeless Ignition

Laser-Driven Light Source with Electrodeless Ignition

X-RAY GENERATION APPARATUS

ROTARY ANODE UNIT AND X-RAY GENERATION APPARATUS

Laser-Driven Light Source

Laser-Heated Infrared Source

Inventory control and communication system

Inductively-Driven Plasma Light Source

Inductively-driven plasma light source

Toroidal Low-Field Reactive Gas and Plasma Source Having a Dielectr...

Inductively-driven plasma light source

Pulsed mass flow delivery system and method

Pulsed mass flow delivery system and method

Pulsed mass flow delivery system and method

Isolation valve for energetic and high temperature gases

Parallel plate valve assembly

Inductively-driven plasma light source

Inductively-driven light source for lithography

Inductively-driven plasma light source

Inductively-driven light source for microscopy

Pulsed mass flow delivery system and method

POROUS VALVE ASSEMBLY

Toroidal low-field reactive gas and plasma source having a dielectr...

Flow control valve with magnetic field sensor