Megumi UNO

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Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Cleaning apparatus for cleaning member, cleaning method for cleanin...
- Patent number 12,358,028
- Issue date Jul 15, 2025
- Ebara Corporation
- Megumi Uno
- B08 - CLEANING
Information Patent Grant
Method and apparatus for cleaning washing tool, substrate washing d...
- Patent number 12,251,738
- Issue date Mar 18, 2025
- Ebara Corporation
- Megumi Uno
- B08 - CLEANING
Information Patent Grant
Method for determining a cleanliness of a cleaning member
- Patent number 12,101,073
- Issue date Sep 24, 2024
- Ebara Corporation
- Chikako Takatoh
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
- Publication number 20250144674
- Publication date May 8, 2025
- EBARA CORPORATION
- Chikako TAKATOH
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
- Publication number 20250144675
- Publication date May 8, 2025
- EBARA CORPORATION
- Chikako TAKATOH
- B08 - CLEANING
Information Patent Application
CLEANING METHOD AND APPARATUS FOR WASHING TOOL, SUBSTRATE WASHING A...
- Publication number 20250076200
- Publication date Mar 6, 2025
- EBARA CORPORATION
- MEGUMI UNO
- B08 - CLEANING
Information Patent Application
CLEANING APPARATUS FOR CLEANING MEMBER, CLEANING METHOD FOR CLEANIN...
- Publication number 20240050991
- Publication date Feb 15, 2024
- EBARA CORPORATION
- Megumi UNO
- B08 - CLEANING
Information Patent Application
METHOD AND APPARATUS FOR CLEANING WASHING TOOL, SUBSTRATE WASHING D...
- Publication number 20240024928
- Publication date Jan 25, 2024
- EBARA CORPORATION
- Megumi UNO
- B08 - CLEANING
Information Patent Application
METHOD FOR DETERMINING CLEANLINESS OF CLEANING MEMBER, METHOD FOR D...
- Publication number 20210384881
- Publication date Dec 9, 2021
- EBARA CORPORATION
- Chikako Takatoh
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
- Publication number 20210039142
- Publication date Feb 11, 2021
- EBARA CORPORATION
- Chikako TAKATOH
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Cleaning apparatus for cleaning member, cleaning method for cleanin...

Method and apparatus for cleaning washing tool, substrate washing d...

Method for determining a cleanliness of a cleaning member

Patents Applicationslast 30 patents

SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD

SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD

CLEANING METHOD AND APPARATUS FOR WASHING TOOL, SUBSTRATE WASHING A...

CLEANING APPARATUS FOR CLEANING MEMBER, CLEANING METHOD FOR CLEANIN...

METHOD AND APPARATUS FOR CLEANING WASHING TOOL, SUBSTRATE WASHING D...

METHOD FOR DETERMINING CLEANLINESS OF CLEANING MEMBER, METHOD FOR D...

SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD