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Michiro Takano
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Kawasaki, JP
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last 30 patents
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Patent Grant
Post exposure modification of critical dimensions in mask fabrication
Patent number
6,801,295
Issue date
Oct 5, 2004
Intel Corporation
Hiroyuki Inomata
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Heat-treating apparatus capable of high temperature uniformity
Patent number
6,399,926
Issue date
Jun 4, 2002
Sigmameltec Ltd.
Michiro Takano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Automatic developing apparatus
Patent number
4,745,422
Issue date
May 17, 1988
Kabushiki Kaisha Toshiba
Yasuo Matsuoka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Post exposure modification of critical dimensions in mask fabrication
Publication number
20030059688
Publication date
Mar 27, 2003
Hiroyuki Inomata
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Apparatus for Heat-treating substrate
Publication number
20010025795
Publication date
Oct 4, 2001
Michiro Takano
H01 - BASIC ELECTRIC ELEMENTS