Minoru Aoyagi

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Yamanashi-ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Vacuum process apparatus and vacuum processing method
- Patent number 5,611,655
- Issue date Mar 18, 1997
- Tokyo Electron Limited
- Yoshio Fukasawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...