Nanaji Saka

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Cambridge, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Chemical mechanical polishing of copper-oxide damascene structures
- Patent number 6,667,239
- Issue date Dec 23, 2003
- ASML US, Inc.
- Nanaji Saka
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Chemical mechanical polishing of copper-oxide damascene structures
- Publication number 20030082904
- Publication date May 1, 2003
- ASML US, Inc.
- Nanaji Saka
- B24 - GRINDING POLISHING
Information Patent Application
In-situ method and apparatus for end point detection in chemical me...
- Publication number 20030045100
- Publication date Mar 6, 2003
- Massachusetts Institute of Technology
- Nanaji Saka
- B24 - GRINDING POLISHING