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Naotaka NORO

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  • Nirasaki City, JP
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    Plasma Processing Method
    • Publication number 20210142982
    • Publication date May 13, 2021
    • TOKYO ELECTRON LIMITED
    • Shinya IWASHITA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Film Forming Apparatus
    • Publication number 20200056285
    • Publication date Feb 20, 2020
    • TOKYO ELECTRON LIMITED
    • Naotaka NORO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING METHOD
    • Publication number 20190088475
    • Publication date Mar 21, 2019
    • TOKYO ELECTRON LIMITED
    • Shinya Iwashita
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Film-Forming Method and Film-Forming Apparatus
    • Publication number 20190067015
    • Publication date Feb 28, 2019
    • TOKYO ELECTRON LIMITED
    • Yuichiro WAGATSUMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS, CLEANING METHOD FOR FILM FORMING APPARATUS...
    • Publication number 20180108518
    • Publication date Apr 19, 2018
    • TOKYO ELECTRON LIMITED
    • Naotaka Noro
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF FORMING TITANIUM OXIDE FILM AND METHOD OF FORMING HARD MASK
    • Publication number 20180108534
    • Publication date Apr 19, 2018
    • TOKYO ELECTRON LIMITED
    • Naoki SHINDO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ANALYSIS METHOD FOR SILANOL GROUP OF SUBSTRATE SURFACE
    • Publication number 20180047647
    • Publication date Feb 15, 2018
    • TOKYO ELECTRON LIMITED
    • Miyako Kaneko
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING METHOD, FILM FORMING SYSTEM AND SURFACE PROCESSING METHOD
    • Publication number 20180037989
    • Publication date Feb 8, 2018
    • TOKYO ELECTRON LIMITED
    • Miyako Kaneko
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Film Forming Apparatus
    • Publication number 20170088950
    • Publication date Mar 30, 2017
    • TOKYO ELECTRON LIMITED
    • Naotaka NORO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    • Publication number 20150179408
    • Publication date Jun 25, 2015
    • TOKYO ELECTRON LIMITED
    • Kouji Shimomura
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR FORMING RUTHENIUM OXIDE FILM
    • Publication number 20130115367
    • Publication date May 9, 2013
    • TOKYO ELECTRON LIMITED
    • Naotaka NORO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SILICON FILM FORMATION APPARATUS AND METHOD FOR USING SAME
    • Publication number 20100212581
    • Publication date Aug 26, 2010
    • TOKYO ELECTRON LIMITED
    • Naotaka NORO
    • C30 - CRYSTAL GROWTH
  • Information Patent Application

    METHOD FOR USING FILM FORMATION APPARATUS
    • Publication number 20090090300
    • Publication date Apr 9, 2009
    • Naotaka Noro
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Collecting unit for semiconductor process
    • Publication number 20080104935
    • Publication date May 8, 2008
    • Yukio Tojo
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Application

    Method for using film formation apparatus
    • Publication number 20070093075
    • Publication date Apr 26, 2007
    • Naotaka Noro
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...