Norman L. Turner

Person

Mountain View, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Controlling the characteristics of implanter ion-beams
- Patent number 7,897,943
- Issue date Mar 1, 2011
- Kenneth H. Purser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Controlling the characteristics of implanter ion-beams
- Patent number 7,888,660
- Issue date Feb 15, 2011
- Kenneth H. Purser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Broad energy-range ribbon ion beam collimation using a variable-gra...
- Patent number 7,829,866
- Issue date Nov 9, 2010
- Kenneth H. Purser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam neutralization in low-energy high-current ribbon-beam implanters
- Patent number 7,439,526
- Issue date Oct 21, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Kenneth H. Purser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Broad energy-range ribbon ion beam collimation using a variable-gra...
- Patent number 7,414,249
- Issue date Aug 19, 2008
- Kenneth H. Purser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resonance method for production of intense low-impurity ion beams o...
- Patent number 7,365,340
- Issue date Apr 29, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Kenneth H. Purser
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Controlling the characteristics of implanter ion-beams
- Patent number 7,351,984
- Issue date Apr 1, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Kenneth H. Purser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Controlling the characteristics of implanter ion-beams
- Patent number 7,301,156
- Issue date Nov 27, 2007
- Kenneth H. Purser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Controlling the characteristics of implanter ion-beams
- Patent number 6,933,507
- Issue date Aug 23, 2005
- Kenneth H. Purser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heated and cooled vacuum chamber shield
- Patent number 6,881,305
- Issue date Apr 19, 2005
- Applied Materials, Inc.
- Russell Black
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate transfer shuttle
- Patent number 6,746,198
- Issue date Jun 8, 2004
- Applied Materials, Inc.
- John M. White
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Vacuum processing system having improved substrate heating and cooling
- Patent number 6,688,375
- Issue date Feb 10, 2004
- Applied Materials, Inc.
- Norman L. Turner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate transfer shuttle
- Patent number 6,517,303
- Issue date Feb 11, 2003
- Applied Komatsu Technology, Inc.
- John M. White
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Heated and cooled vacuum chamber shield
- Patent number 6,432,203
- Issue date Aug 13, 2002
- Applied Komatsu Technology, Inc.
- Russell Black
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Modular substrate processing system
- Patent number 6,235,634
- Issue date May 22, 2001
- Applied Komatsu Technology, Inc.
- John M. White
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for etching film layers on large substrates
- Patent number 5,753,133
- Issue date May 19, 1998
- Applied Komatsu Technology, Inc.
- Jerry Wong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of heating and cooling large area glass substrates
- Patent number 5,674,786
- Issue date Oct 7, 1997
- Applied Materials, Inc.
- Norman L. Turner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of heating and cooling large area substrates and apparatus t...
- Patent number 5,607,009
- Issue date Mar 4, 1997
- Applied Materials, Inc.
- Norman L. Turner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum processing apparatus having improved throughput
- Patent number 5,512,320
- Issue date Apr 30, 1996
- Applied Materials, Inc.
- Norman L. Turner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for cooling rectangular substrates
- Patent number 5,509,464
- Issue date Apr 23, 1996
- Applied Materials, Inc.
- Norman Turner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Purge gas in wafer coating area selection
- Patent number 5,447,570
- Issue date Sep 5, 1995
- Genus, Inc.
- Johannes J. Schmitz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Treating workpieces with beams
- Patent number 4,775,796
- Issue date Oct 4, 1988
- Kenneth H. Purser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation with variable implant angle
- Patent number 4,745,287
- Issue date May 17, 1988
- Ionex/HEI
- Norman L. Turner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Platen and beam setup flag assembly for ion implanter
- Patent number 4,717,829
- Issue date Jan 5, 1988
- Varian Associates, Inc.
- Norman L. Turner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for improved ion dose accuracy
- Patent number 4,680,474
- Issue date Jul 14, 1987
- Varian Associates, Inc.
- Norman L. Turner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for controlling thermal transfer in a cyclic v...
- Patent number 4,567,938
- Issue date Feb 4, 1986
- Varian Associates, Inc.
- Norman L. Turner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for controlling thermal transfer in a cyclic v...
- Patent number 4,535,834
- Issue date Aug 20, 1985
- Varian Associates, Inc.
- Norman L. Turner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rapid pumpdown for high vacuum processing
- Patent number 4,475,045
- Issue date Oct 2, 1984
- Varian Associates, Inc.
- Scott C. Holden
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for enhanced neutralization of positively charged ion beam
- Patent number 4,463,255
- Issue date Jul 31, 1984
- Varian Associates, Inc.
- David A. Robertson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam sharing method and apparatus for ion implantation
- Patent number 4,433,247
- Issue date Feb 21, 1984
- Varian Associates, Inc.
- Norman L. Turner
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Broad energy-range ribbon ion beam collimation using a variable-gra...
- Publication number 20080302972
- Publication date Dec 11, 2008
- Kenneth H. Purser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Controlling the characteristics of implanter ion-beams
- Publication number 20070181832
- Publication date Aug 9, 2007
- Kenneth H. Purser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Controlling the characteristics of implanter ion-beams
- Publication number 20070023697
- Publication date Feb 1, 2007
- Kenneth H. Purser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Resonance method for production of intense low-impurity ion beams o...
- Publication number 20070018114
- Publication date Jan 25, 2007
- Kenneth H. Purser
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Broad energy-range ribbon ion beam collimation using a variable-gra...
- Publication number 20060197029
- Publication date Sep 7, 2006
- Kenneth H. Purser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Beam neutralization in low-energy high-current ribbon-beam implanters
- Publication number 20060197037
- Publication date Sep 7, 2006
- Kenneth H. Purser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Controlling the characteristics of implanter ion-beams
- Publication number 20060169924
- Publication date Aug 3, 2006
- Kenneth H. Purser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Controlling the characteristics of implanter ion-beams
- Publication number 20050242294
- Publication date Nov 3, 2005
- Kenneth H. Purser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heated and cooled vacuum chamber shield
- Publication number 20050150757
- Publication date Jul 14, 2005
- Applied Komatsu Technology, Inc.
- Russell Black
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Emittance measuring device for ion beams
- Publication number 20040149926
- Publication date Aug 5, 2004
- Kenneth H. Purser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Controlling the characteristics of implanter ion-beams
- Publication number 20040097058
- Publication date May 20, 2004
- Kenneth H. Purser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for scanning a workpiece in a vacuum chamber
- Publication number 20030197133
- Publication date Oct 23, 2003
- Norman L. Turner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate transfer shuttle
- Publication number 20030190220
- Publication date Oct 9, 2003
- Applied Komatsu Technology, Inc.
- John M. White
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
Heated and cooled vacuum chamber shield
- Publication number 20020108571
- Publication date Aug 15, 2002
- Russell Black
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Norman L. Turner

Person

Patents Grantslast 30 patents

Controlling the characteristics of implanter ion-beams

Controlling the characteristics of implanter ion-beams

Broad energy-range ribbon ion beam collimation using a variable-gra...

Beam neutralization in low-energy high-current ribbon-beam implanters

Broad energy-range ribbon ion beam collimation using a variable-gra...

Resonance method for production of intense low-impurity ion beams o...

Controlling the characteristics of implanter ion-beams

Controlling the characteristics of implanter ion-beams

Controlling the characteristics of implanter ion-beams

Heated and cooled vacuum chamber shield

Substrate transfer shuttle

Vacuum processing system having improved substrate heating and cooling

Substrate transfer shuttle

Heated and cooled vacuum chamber shield

Modular substrate processing system

Method and apparatus for etching film layers on large substrates

Method of heating and cooling large area glass substrates

Method of heating and cooling large area substrates and apparatus t...

Vacuum processing apparatus having improved throughput

Method and apparatus for cooling rectangular substrates

Purge gas in wafer coating area selection

Treating workpieces with beams

Ion implantation with variable implant angle

Platen and beam setup flag assembly for ion implanter

Method and apparatus for improved ion dose accuracy

Method and apparatus for controlling thermal transfer in a cyclic v...

Method and apparatus for controlling thermal transfer in a cyclic v...

Rapid pumpdown for high vacuum processing

Apparatus for enhanced neutralization of positively charged ion beam

Beam sharing method and apparatus for ion implantation

Patents Applicationslast 30 patents

Broad energy-range ribbon ion beam collimation using a variable-gra...

Controlling the characteristics of implanter ion-beams

Controlling the characteristics of implanter ion-beams

Resonance method for production of intense low-impurity ion beams o...

Broad energy-range ribbon ion beam collimation using a variable-gra...

Beam neutralization in low-energy high-current ribbon-beam implanters

Controlling the characteristics of implanter ion-beams

Controlling the characteristics of implanter ion-beams

Heated and cooled vacuum chamber shield

Emittance measuring device for ion beams

Controlling the characteristics of implanter ion-beams

Method and apparatus for scanning a workpiece in a vacuum chamber

Substrate transfer shuttle

Heated and cooled vacuum chamber shield