Onur Demirer

Person

Austin, TX, US

People

Patents Grantslast 30 patents

Information Patent Grant
System and method for wafer-by-wafer overlay feedforward and lot-to...
- Patent number 11,221,561
- Issue date Jan 11, 2022
- KLA Corporation
- Onur Nihat Demirer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system for process control with flexible sampling
- Patent number 10,754,260
- Issue date Aug 25, 2020
- KLA-Tencor Corporation
- Onur Demirer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Overlay variance stabilization methods and systems
- Patent number 10,691,028
- Issue date Jun 23, 2020
- KLA-Tencor Corporation
- Hoyoung Heo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Determination of sampling maps for alignment measurements based on...
- Patent number 10,692,227
- Issue date Jun 23, 2020
- KLA-Tencor Corporation
- Brent A. Riggs
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Layer-to-layer feedforward overlay control with alignment corrections
- Patent number 10,444,639
- Issue date Oct 15, 2019
- KLA-Tencor Corporation
- Onur Nihat Demirer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Systems and methods for automated multi-zone detection and modeling
- Patent number 10,340,165
- Issue date Jul 2, 2019
- KLA-Tencor Corporation
- Jeremy Nabeth
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
System and Method for Wafer-By-Wafer Overlay Feedforward and Lot-To...
- Publication number 20210216021
- Publication date Jul 15, 2021
- KLA Corporation
- Onur Nihat Demirer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Layer-to-Layer Feedforward Overlay Control with Alignment Corrections
- Publication number 20180253016
- Publication date Sep 6, 2018
- KLA-Tencor Corporation
- Onur Nihat Demirer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Determination of Sampling Maps for Alignment Measurements Based on...
- Publication number 20180189964
- Publication date Jul 5, 2018
- KLA-Tencor Corporation
- Brent A. Riggs
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Systems and Methods for Automated Multi-Zone Detection and Modeling
- Publication number 20170287754
- Publication date Oct 5, 2017
- KLA-Tencor Corporation
- Jeremy Nabeth
- G01 - MEASURING TESTING
Information Patent Application
Overlay Variance Stabilization Methods and Systems
- Publication number 20170219928
- Publication date Aug 3, 2017
- KLA-Tencor Corporation
- Hoyoung Heo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and System for Process Control with Flexible Sampling
- Publication number 20160370718
- Publication date Dec 22, 2016
- KLA-Tencor Corporation
- Onur Demirer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Onur Demirer

Person

Patents Grantslast 30 patents

System and method for wafer-by-wafer overlay feedforward and lot-to...

Method and system for process control with flexible sampling

Overlay variance stabilization methods and systems

Determination of sampling maps for alignment measurements based on...

Layer-to-layer feedforward overlay control with alignment corrections

Systems and methods for automated multi-zone detection and modeling

Patents Applicationslast 30 patents

System and Method for Wafer-By-Wafer Overlay Feedforward and Lot-To...

Layer-to-Layer Feedforward Overlay Control with Alignment Corrections

Determination of Sampling Maps for Alignment Measurements Based on...

Systems and Methods for Automated Multi-Zone Detection and Modeling

Overlay Variance Stabilization Methods and Systems

Method and System for Process Control with Flexible Sampling