Paul Rhoades

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Mountainview, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method of etching contact openings with reduced removal rate of und...
- Patent number 5,658,425
- Issue date Aug 19, 1997
- Lam Research Corporation
- Mark Halman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of etching vias without sputtering of underlying electricall...
- Patent number 5,269,879
- Issue date Dec 14, 1993
- Lam Research Corporation
- Paul Rhoades
- H01 - BASIC ELECTRIC ELEMENTS