Ralf Gehrke

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Aalen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Metrology system having an EUV optical unit
- Patent number 10,948,637
- Issue date Mar 16, 2021
- Carl Zeiss SMT GmbH
- Dirk Hellweg
- G01 - MEASURING TESTING
Information Patent Grant
Method for predicting at least one illumination parameter for evalu...
- Patent number 10,394,128
- Issue date Aug 27, 2019
- Carl Zeiss SMT GmbH
- Ralf Gehrke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for predicting at least one illumination parameter for evalu...
- Patent number 10,078,267
- Issue date Sep 18, 2018
- Carl Zeiss SMT GmbH
- Ralf Gehrke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR APPROXIMATING IMAGING PROPERTIES OF AN OPTICAL PRODUCTIO...
- Publication number 20220057709
- Publication date Feb 24, 2022
- Carl Zeiss SMT GMBH
- Markus Koch
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METROLOGY SYSTEM HAVING AN EUV OPTICAL UNIT
- Publication number 20190011615
- Publication date Jan 10, 2019
- Carl Zeiss SMT GMBH
- Dirk Hellweg
- G02 - OPTICS
Information Patent Application
METHOD FOR PREDICTING AT LEAST ONE ILLUMINATION PARAMETER FOR EVALU...
- Publication number 20190004432
- Publication date Jan 3, 2019
- Carl Zeiss SMT GMBH
- Ralf Gehrke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR PREDICTING AT LEAST ONE ILLUMINATION PARAMETER FOR EVALU...
- Publication number 20170212426
- Publication date Jul 27, 2017
- Carl Zeiss SMT GMBH
- Ralf Gehrke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY