Richard D. Russ

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Santa Clara, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Chemical-mechanical-polishing system with continuous filtration
- Patent number 6,244,929
- Issue date Jun 12, 2001
- VLSI Technology, Inc.
- Richard D. Russ
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Chemical-mechanical-polishing system with continuous filtration
- Patent number 6,165,048
- Issue date Dec 26, 2000
- VLSI Technology, Inc.
- Richard D. Russ
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Complementary material conditioning system for a chemical mechanica...
- Patent number 6,022,265
- Issue date Feb 8, 2000
- VLSI Technology, Inc.
- Charles F. Drill
- B24 - GRINDING POLISHING