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Robert Wieland
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Munchen, DE
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Patents Grants
last 30 patents
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Patent Grant
Process for etching, and chamber cleaning and a gas therefor
Patent number
11,149,347
Issue date
Oct 19, 2021
Solvay S.A.
Michael Pittroff
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Bipolar carrier wafer and mobile bipolar electrostatic wafer arrang...
Patent number
7,667,945
Issue date
Feb 23, 2010
Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
Robert Wieland
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Patents Applications
last 30 patents
Information
Patent Application
APPARATUS AND METHOD FOR ANISOTROPIC DRIE ETCHING WITH FLUORINE GAS...
Publication number
20190244827
Publication date
Aug 8, 2019
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG e.V.
Robert WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESS FOR ETCHING, AND CHAMBER CLEANING AND A GAS THEREFOR
Publication number
20180163300
Publication date
Jun 14, 2018
SOLVAY S.A.
Michael PITTROFF
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Bipolar Carrier Wafer and Mobile Bipolar Electrostatic Wafer Arrang...
Publication number
20080237819
Publication date
Oct 2, 2008
Robert Wieland
H01 - BASIC ELECTRIC ELEMENTS