Ryugo KAGETANI

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Patents Grantslast 30 patents

Information Patent Grant
Pattern height information correction system and pattern height inf...
- Patent number 11,448,663
- Issue date Sep 20, 2022
- HITACHI HIGH-TECH CORPORATION
- Kenji Yamasaki
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Pattern Inspection/Measurement Device, and Pattern Inspection/Measu...
- Publication number 20230194253
- Publication date Jun 22, 2023
- Hitachi High-Tech Corporation
- Ryugo KAGETANI
- G01 - MEASURING TESTING
Information Patent Application
Defect Inspection Apparatus and Defect Inspection Method
- Publication number 20220335594
- Publication date Oct 20, 2022
- HITACHI HIGH-TECH CORPORATION
- Yasushi EBIZUKA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Pattern Height Information Correction System and Pattern Height Inf...
- Publication number 20210080485
- Publication date Mar 18, 2021
- HITACHI HIGH-TECH CORPORATION
- Kenji YAMASAKI
- G01 - MEASURING TESTING