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Sadanand V. Deshpande
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Bangalore, IN
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last 30 patents
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Patent Grant
Dual pulse driven extreme ultraviolet (EUV) radiation source method
Patent number
9,451,684
Issue date
Sep 20, 2016
International Business Machines Corporation
Daniel A. Corliss
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Patent Grant
Dual pulse driven extreme ultraviolet (EUV) radiation source utiliz...
Patent number
9,301,381
Issue date
Mar 29, 2016
International Business Machines Corporation
Daniel A. Corliss
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
DUAL PULSE DRIVEN EXTREME ULTRAVIOLET (EUV) RADIATION SOURCE
Publication number
20160205757
Publication date
Jul 14, 2016
International Business Machines Corporation
Daniel A. Corliss
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
DUAL PULSE DRIVEN EXTREME ULTRAVIOLET (EUV) RADIATION SOURCE UTILIZ...
Publication number
20160081174
Publication date
Mar 17, 2016
International Business Machines Corporation
Daniel A. Corliss
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR