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Saravanapriyan Sriraman
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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Semiconductor substrate bevel cleaning
Patent number
12,068,152
Issue date
Aug 20, 2024
Lam Research Corporation
Saravanapriyan Sriraman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems for cooling RF heated chamber components
Patent number
11,887,819
Issue date
Jan 30, 2024
Lam Research Corporation
Jon McChesney
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of etch model calibration using optical scatterometry
Patent number
11,704,463
Issue date
Jul 18, 2023
Lam Research Corporation
Ye Feng
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Air cooled faraday shield and methods for using the same
Patent number
11,692,732
Issue date
Jul 4, 2023
Lam Research Corporation
Saravanapriyan Sriraman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Resist and etch modeling
Patent number
11,624,981
Issue date
Apr 11, 2023
Lam Research Corporation
Saravanapriyan Sriraman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-zone cooling of plasma heated window
Patent number
11,538,666
Issue date
Dec 27, 2022
Lam Research Corporation
Yiting Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems for cooling RF heated chamber components
Patent number
11,495,441
Issue date
Nov 8, 2022
Lam Research Corporation
Jon McChesney
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Control of on-wafer cd uniformity with movable edge ring and gas in...
Patent number
11,424,103
Issue date
Aug 23, 2022
Lam Research Corporation
Yiting Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Internal plasma grid for semiconductor fabrication
Patent number
11,171,021
Issue date
Nov 9, 2021
Lam Research Corporation
Harmeet Singh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of etch model calibration using optical scatterometry
Patent number
10,997,345
Issue date
May 4, 2021
Lam Research Corporation
Ye Feng
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Systems for cooling RF heated chamber components
Patent number
10,825,661
Issue date
Nov 3, 2020
Lam Research Corporation
Jon McChesney
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Air cooled faraday shield and methods for using the same
Patent number
10,690,374
Issue date
Jun 23, 2020
Lam Research Corporation
Saravanapriyan Sriraman
F24 - HEATING RANGES VENTILATING
Information
Patent Grant
Photoresist design layout pattern proximity correction through fast...
Patent number
10,585,347
Issue date
Mar 10, 2020
Lam Research Corporation
Saravanapriyan Sriraman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of etch model calibration using optical scatterometry
Patent number
10,572,697
Issue date
Feb 25, 2020
Lam Research Corporation
Ye Feng
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Layout pattern proximity correction through edge placement error pr...
Patent number
10,534,257
Issue date
Jan 14, 2020
Lam Research Corporation
Mehmet Derya Tetiker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Gas reaction trajectory control through tunable plasma dissociation...
Patent number
10,460,951
Issue date
Oct 29, 2019
Lam Research Corporation
Saravanapriyan Sriraman
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Control of on-wafer CD uniformity with movable edge ring and gas in...
Patent number
10,410,832
Issue date
Sep 10, 2019
Lam Research Corporation
Yiting Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatuses for etch profile matching by surface kineti...
Patent number
10,386,828
Issue date
Aug 20, 2019
Lam Research Corporation
Mehmet Derya Tetiker
G05 - CONTROLLING REGULATING
Information
Patent Grant
Methods and apparatuses for etch profile optimization by reflectanc...
Patent number
10,303,830
Issue date
May 28, 2019
Lam Research Corporation
Mehmet Derya Tetiker
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Fast-gas switching for etching
Patent number
10,262,867
Issue date
Apr 16, 2019
Lam Research Corporation
Saravanapriyan Sriraman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Layout pattern proximity correction through fast edge placement err...
Patent number
10,254,641
Issue date
Apr 9, 2019
Lam Research Corporation
Julien Mailfert
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Ceramic showerhead including central gas injector for tunable conve...
Patent number
10,249,511
Issue date
Apr 2, 2019
Lam Research Corporation
Saravanapriyan Sriraman
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Near-substrate supplemental plasma density generation with low bias...
Patent number
10,242,845
Issue date
Mar 26, 2019
Lam Research Corporation
Zhongkui Tan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Photoresist design layout pattern proximity correction through fast...
Patent number
10,197,908
Issue date
Feb 5, 2019
Lam Research Corporation
Saravanapriyan Sriraman
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Extreme edge sheath and wafer profile tuning through edge-localized...
Patent number
10,163,610
Issue date
Dec 25, 2018
Lam Research Corporation
Saravanapriyan Sriraman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatuses for etch profile optimization by reflectanc...
Patent number
9,996,647
Issue date
Jun 12, 2018
Lam Research Corporation
Mehmet Derya Tetiker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Systems for cooling RF heated chamber components
Patent number
9,978,565
Issue date
May 22, 2018
Lam Research Corporation
Jon McChesney
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas reaction trajectory control through tunable plasma dissociation...
Patent number
9,966,270
Issue date
May 8, 2018
Lam Research Corporation
Saravanapriyan Sriraman
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Air cooled faraday shield and methods for using the same
Patent number
9,885,493
Issue date
Feb 6, 2018
Lam Research Corporation
Saravanapriyan Sriraman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatuses for etch profile optimization by reflectanc...
Patent number
9,792,393
Issue date
Oct 17, 2017
Lam Research Corporation
Mehmet Derya Tetiker
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
HYBRID LIQUID/AIR COOLING SYSTEM FOR TCP WINDOWS
Publication number
20230245854
Publication date
Aug 3, 2023
LAM RESEARCH CORPORATION
Andrea ALBERTI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RESIST AND ETCH MODELING
Publication number
20230205076
Publication date
Jun 29, 2023
LAM RESEARCH CORPORATION
Saravanapriyan Sriraman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-ZONE COOLING OF PLASMA HEATED WINDOW
Publication number
20230121097
Publication date
Apr 20, 2023
LAM RESEARCH CORPORATION
Yiting ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PERFORMANCE PREDICTORS FOR SEMICONDUCTOR-MANUFACTURING PROCESSES
Publication number
20230049157
Publication date
Feb 16, 2023
LAM RESEARCH CORPORATION
Kapil Umesh Sawlani
G05 - CONTROLLING REGULATING
Information
Patent Application
SYSTEMS FOR COOLING RF HEATED CHAMBER COMPONENTS
Publication number
20230039721
Publication date
Feb 9, 2023
LAM RESEARCH CORPORATION
Jon MCCHESNEY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR SUBSTRATE BEVEL CLEANING
Publication number
20220375746
Publication date
Nov 24, 2022
LAM RESEARCH CORPORATION
Saravanapriyan SRIRAMAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MOVEABLE EDGE RINGS FOR SUBSTRATE PROCESSING SYSTEMS
Publication number
20220328290
Publication date
Oct 13, 2022
LAM RESEARCH COPORATION
Rohini MISHRA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EDGE RING SYSTEMS FOR SUBSTRATE PROCESSING SYSTEMS
Publication number
20220285136
Publication date
Sep 8, 2022
LAM RESEARCH CORPORATION
Hui Ling HAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MOVEABLE EDGE RINGS WITH REDUCED CAPACITANCE VARIATION FOR SUBSTRAT...
Publication number
20220270863
Publication date
Aug 25, 2022
LAM RESEARCH CORPORATION
Christopher Kimball
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MOVEABLE EDGE RINGS WITH REDUCED CAPACITANCE VARIATION FOR SUBSTRAT...
Publication number
20220254612
Publication date
Aug 11, 2022
LAM RESEARCH CORPORATION
Christopher KIMBALL
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF ETCH MODEL CALIBRATION USING OPTICAL SCATTEROMETRY
Publication number
20210216695
Publication date
Jul 15, 2021
LAM RESEARCH CORPORATION
Ye Feng
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
RESIST AND ETCH MODELING
Publication number
20210157228
Publication date
May 27, 2021
LAM RESEARCH CORPORATION
Saravanapriyan Sriraman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS FOR COOLING RF HEATED CHAMBER COMPONENTS
Publication number
20210050188
Publication date
Feb 18, 2021
LAM RESEARCH CORPORATION
Jon MCCHESNEY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Air Cooled Faraday Shield and Methods for Using the Same
Publication number
20200318852
Publication date
Oct 8, 2020
LAM RESEARCH CORPORATION
Saravanapriyan Sriraman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF ETCH MODEL CALIBRATION USING OPTICAL SCATTEROMETRY
Publication number
20200218844
Publication date
Jul 9, 2020
LAM RESEARCH CORPORATION
Ye Feng
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
CONTROL OF ON-WAFER CD UNIFORMITY WITH MOVABLE EDGE RING AND GAS IN...
Publication number
20190362940
Publication date
Nov 28, 2019
LAM RESEARCH CORPORATION
Yiting Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF ETCH MODEL CALIBRATION USING OPTICAL SCATTEROMETRY
Publication number
20190311083
Publication date
Oct 10, 2019
LAM RESEARCH CORPORATION
Ye Feng
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PHOTORESIST DESIGN LAYOUT PATTERN PROXIMITY CORRECTION THROUGH FAST...
Publication number
20190250501
Publication date
Aug 15, 2019
LAM RESEARCH CORPORATION
Saravanapriyan Sriraman
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Multi-Zone Cooling Of Plasma Heated Window
Publication number
20190148118
Publication date
May 16, 2019
LAM RESEARCH CORPORATION
Yiting ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND APPARATUSES FOR ETCH PROFILE OPTIMIZATION BY REFLECTANC...
Publication number
20190049937
Publication date
Feb 14, 2019
LAM RESEARCH CORPORATION
Mehmet Derya Tetiker
G05 - CONTROLLING REGULATING
Information
Patent Application
DESIGN LAYOUT PATTERN PROXIMITY CORRECTION THROUGH EDGE PLACEMENT E...
Publication number
20180314148
Publication date
Nov 1, 2018
LAM RESEARCH CORPORATION
Mehmet Derya Tetiker
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHODS AND APPARATUSES FOR ETCH PROFILE OPTIMIZATION BY REFLECTANC...
Publication number
20180260509
Publication date
Sep 13, 2018
Lam Research Corporation
Mehmet Derya Tetiker
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SYSTEMS FOR COOLING RF HEATED CHAMBER COMPONENTS
Publication number
20180247796
Publication date
Aug 30, 2018
LAM RESEARCH CORPORATION
Jon MCCHESNEY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS REACTION TRAJECTORY CONTROL THROUGH TUNABLE PLASMA DISSOCIATION...
Publication number
20180240677
Publication date
Aug 23, 2018
LAM RESEARCH CORPORATION
Saravanapriyan Sriraman
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Near-Substrate Supplemental Plasma Density Generation with Low Bias...
Publication number
20180204708
Publication date
Jul 19, 2018
LAM RESEARCH CORPORATION
Zhongkui Tan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Air Cooled Faraday Shield and Methods for Using the Same
Publication number
20180156489
Publication date
Jun 7, 2018
LAM RESEARCH CORPORATION
Saravanapriyan Sriraman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DESIGN LAYOUT PATTERN PROXIMITY CORRECTION THROUGH FAST EDGE PLACEM...
Publication number
20180157161
Publication date
Jun 7, 2018
LAM RESEARCH CORPORATION
Julien Mailfert
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
CONTROL OF ON-WAFER CD UNIFORMITY WITH MOVABLE EDGE RING AND GAS IN...
Publication number
20180053629
Publication date
Feb 22, 2018
LAM RESEARCH CORPORATION
Yiting Zhang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS AND APPARATUSES FOR ETCH PROFILE OPTIMIZATION BY REFLECTANC...
Publication number
20170371991
Publication date
Dec 28, 2017
LAM RESEARCH CORPORATION
Mehmet Derya Tetiker
G01 - MEASURING TESTING
Information
Patent Application
PHOTORESIST DESIGN LAYOUT PATTERN PROXIMITY CORRECTION THROUGH FAST...
Publication number
20170363950
Publication date
Dec 21, 2017
LAM RESEARCH CORPORATION
Saravanapriyan Sriraman
G06 - COMPUTING CALCULATING COUNTING