Sena FUJITA

Person

Nirasaki City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film forming method and film forming apparatus
- Patent number 11,915,914
- Issue date Feb 27, 2024
- Tokyo Electron Limited
- Sena Fujita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 11,410,847
- Issue date Aug 9, 2022
- Tokyo Electron Limited
- Hiroyuki Hayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning method of substrate processing apparatus and substrate pro...
- Patent number 11,260,433
- Issue date Mar 1, 2022
- Tokyo Electron Limited
- Yoshihiro Takezawa
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMATION METHOD AND FILM FORMATION DEVICE
- Publication number 20240254617
- Publication date Aug 1, 2024
- TOKYO ELECTRON LIMITED
- Sena FUJITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20230243031
- Publication date Aug 3, 2023
- TOKYO ELECTRON LIMITED
- Sena FUJITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20230135342
- Publication date May 4, 2023
- TOKYO ELECTRON LIMITED
- Sena FUJITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEANING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220364228
- Publication date Nov 17, 2022
- Tokyo Electron Limited
- Yoshihiro TAKEZAWA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200312677
- Publication date Oct 1, 2020
- TOKYO ELECTRON LIMITED
- Yoshihiro TAKEZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20200312661
- Publication date Oct 1, 2020
- TOKYO ELECTRON LIMITED
- Hiroyuki HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cleaning Method of Substrate Processing Apparatus and Substrate Pro...
- Publication number 20200230666
- Publication date Jul 23, 2020
- TOKYO ELECTRON LIMITED
- Yoshihiro TAKEZAWA
- B08 - CLEANING
Information Patent Application
Cleaning Method and Operating Method of Film-Forming Apparatus, and...
- Publication number 20190284687
- Publication date Sep 19, 2019
- TOKYO ELECTRON LIMITED
- Tatsuya MIYAHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Sena FUJITA

Person

Patents Grantslast 30 patents

Film forming method and film forming apparatus

Film forming method and film forming apparatus

Cleaning method of substrate processing apparatus and substrate pro...

Patents Applicationslast 30 patents

FILM FORMATION METHOD AND FILM FORMATION DEVICE

FILM FORMING METHOD AND FILM FORMING APPARATUS

FILM FORMING METHOD AND FILM FORMING APPARATUS

CLEANING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

FILM FORMING METHOD AND FILM FORMING APPARATUS

Cleaning Method of Substrate Processing Apparatus and Substrate Pro...

Cleaning Method and Operating Method of Film-Forming Apparatus, and...