TREA

Sheng-Chi Chin

Follow

Person

  • Hsinchu City, TW
People

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    Acoustic Measurement of Fabrication Equipment Clearance
    • Publication number 20240377364
    • Publication date Nov 14, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Jun-Hao Deng
    • B08 - CLEANING
  • Information Patent Application

    Acoustic Measurement of Fabrication Equipment Clearance
    • Publication number 20230366857
    • Publication date Nov 16, 2023
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Jun-Hao Deng
    • B08 - CLEANING
  • Information Patent Application

    Lithography Method With Reduced Impacts of Mask Defects
    • Publication number 20210208505
    • Publication date Jul 8, 2021
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Shinn-Sheng Yu
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Acoustic Measurement of Fabrication Equipment Clearance
    • Publication number 20210072196
    • Publication date Mar 11, 2021
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Jun-Hao Deng
    • B08 - CLEANING
  • Information Patent Application

    System and Method for Localized EUV Pellicle Glue Removal
    • Publication number 20200150523
    • Publication date May 14, 2020
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Tzu-Ting Chou
    • B08 - CLEANING
  • Information Patent Application

    Pellicle for Advanced Lithography
    • Publication number 20190072849
    • Publication date Mar 7, 2019
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Yu-Ching Lee
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Lithography Method with Reduced Impacts of Mask Defects
    • Publication number 20190033720
    • Publication date Jan 31, 2019
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Shinn-Sheng Yu
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Acoustic Measurement of Fabrication Equipment Clearance
    • Publication number 20180348171
    • Publication date Dec 6, 2018
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Jun-Hao Deng
    • B08 - CLEANING
  • Information Patent Application

    FOCUSED RADIATION BEAM INDUCED DEPOSITION
    • Publication number 20180203347
    • Publication date Jul 19, 2018
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Hsun-Chuan SHIH
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD TO FABRICATE MASK-PELLICLE SYSTEM
    • Publication number 20180088459
    • Publication date Mar 29, 2018
    • Taiwan Semiconductor Manufacturing company Ltd.
    • Chun-Hao TSENG
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    System and Method for Localized EUV Pellicle Glue Removal
    • Publication number 20180031962
    • Publication date Feb 1, 2018
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Tzu-Ting Chou
    • B08 - CLEANING
  • Information Patent Application

    METHOD FOR REPAIRING A MASK
    • Publication number 20170352144
    • Publication date Dec 7, 2017
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Shinn-Sheng YU
    • G06 - COMPUTING CALCULATING COUNTING
  • Information Patent Application

    PELLICLE FOR ADVANCED LITHOGRAPHY
    • Publication number 20170227843
    • Publication date Aug 10, 2017
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Yu-Ching Lee
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    FOCUSED RADIATION BEAM INDUCED DEPOSITION
    • Publication number 20170140927
    • Publication date May 18, 2017
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Hsun-Chuan Shih
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD FOR REPAIRING A MASK
    • Publication number 20170139321
    • Publication date May 18, 2017
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Shang-Lun Tsai
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Acoustic Measurement of Fabrication Equipment Clearance
    • Publication number 20170138911
    • Publication date May 18, 2017
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Jun-Hao Deng
    • B08 - CLEANING
  • Information Patent Application

    METHOD TO FABRICATE MASK-PELLICLE SYSTEM
    • Publication number 20170082920
    • Publication date Mar 23, 2017
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chun-Hao Tseng
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    Mask Pellicle Indicator for Haze Prevention
    • Publication number 20170003585
    • Publication date Jan 5, 2017
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Kuan-Wen Lin
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PELLICLE AGING ESTIMATION AND PARTICLE REMOVAL FROM PELLICLE VIA AC...
    • Publication number 20160274471
    • Publication date Sep 22, 2016
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Yu-Ching Lee
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Method and Apparatus for Enhanced Cleaning and Inspection
    • Publication number 20160005591
    • Publication date Jan 7, 2016
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chi-Lun Lu
    • B08 - CLEANING
  • Information Patent Application

    Lithography System And Method For Haze Elimination
    • Publication number 20150212419
    • Publication date Jul 30, 2015
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Ching-Wei Shen
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Lithographic Photomask With Inclined Sides
    • Publication number 20150104731
    • Publication date Apr 16, 2015
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Ching-Fang Yu
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    EUV Mask and Method for Forming the Same
    • Publication number 20140205938
    • Publication date Jul 24, 2014
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Ching-Fang Yu
    • B82 - NANO-TECHNOLOGY
  • Information Patent Application

    Stacked Mask
    • Publication number 20140178804
    • Publication date Jun 26, 2014
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Burn Jeng Lin
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    DEVICE MANUFACTURING AND CLEANING METHOD
    • Publication number 20140051252
    • Publication date Feb 20, 2014
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chi-Lun Lu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Method and Apparatus for Enhanced Cleaning and Inspection
    • Publication number 20140007371
    • Publication date Jan 9, 2014
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chi-Lun Lu
    • A47 - FURNITURE DOMESTIC ARTICLES OR APPLIANCES COFFEE MILLS SPICE MILLS SUCT...
  • Information Patent Application

    DEVICE MANUFACTURING AND CLEANING METHOD
    • Publication number 20130323931
    • Publication date Dec 5, 2013
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chi-Lun Lu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    System and Method for Combined Intraoverlay and Defect Inspection
    • Publication number 20130298088
    • Publication date Nov 7, 2013
    • Taiwan Semiconductor Manufacturing Company Ltd.
    • Hsin-Chang Lee
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    METHOD AND APPARATUS FOR DEFECT IDENTIFICATION
    • Publication number 20130287287
    • Publication date Oct 31, 2013
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Mei-Chun Lin
    • G06 - COMPUTING CALCULATING COUNTING
  • Information Patent Application

    MASK AND METHOD FOR FORMING THE MASK
    • Publication number 20130202992
    • Publication date Aug 8, 2013
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chia-Jen Chen
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY