Shinji Miyaki

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Tokushima, JP

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam exposure system using line beams
- Patent number 4,980,567
- Issue date Dec 25, 1990
- Fujitsu Limited
- Hiroshi Yasuda
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam exposure method and apparatus
- Patent number 4,950,910
- Issue date Aug 21, 1990
- Fujitsu Limited
- Hiroshi Yasuda
- B82 - NANO-TECHNOLOGY