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Shintaro TAMURA
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Kamisato, JP
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last 30 patents
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Patent Grant
Optical surface defect inspection apparatus and optical surface def...
Patent number
8,547,547
Issue date
Oct 1, 2013
Hitachi High-Technologies Corporation
Shintaro Tamura
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
OPTICAL SURFACE DEFECT INSPECTION APPARATUS AND OPTICAL SURFACE DEF...
Publication number
20120075625
Publication date
Mar 29, 2012
Shintaro TAMURA
G01 - MEASURING TESTING