Shuuji Hagiwara

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Toyohashi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Untreated body transfer device and semiconductor manufacturing devi...
- Patent number 7,393,172
- Issue date Jul 1, 2008
- Tokyo Electron Limited
- Hiroaki Saeki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mounting/demounting device for wafer carrier lid
- Patent number 6,984,097
- Issue date Jan 10, 2006
- Tokyo Electron Limited
- Hiroaki Saeki
- H01 - BASIC ELECTRIC ELEMENTS