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Sriharsha JAYANTI
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Fremont, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Method for generating vertical profiles in organic layer etches
Patent number
10,546,756
Issue date
Jan 28, 2020
Lam Research Corporation
Sriharsha Jayanti
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
HIGH SELECTIVITY AND UNIFORM DIELECTRIC ETCH
Publication number
20250087456
Publication date
Mar 13, 2025
LAM RESEARCH CORPORATION
Sriharsha Jayanti
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR REDUCING VARIATIONS IN MASK TOPOGRAPHY
Publication number
20250054769
Publication date
Feb 13, 2025
LAM RESEARCH CORPORATION
Hsu-Cheng HUANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR GENERATING VERTICAL PROFILES IN ORGANIC LAYER ETCHES
Publication number
20180151386
Publication date
May 31, 2018
LAM RESEARCH CORPORATION
Sriharsha JAYANTI
H01 - BASIC ELECTRIC ELEMENTS