Stefan RAU

Follow

Person

Dresden, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method for determining a substrate position in a closed chamber and...
- Patent number 12,046,493
- Issue date Jul 23, 2024
- China Thumph International Engineering Co., Ltd.
- Shou Peng
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method for determining a substrate position in a closed chamber and...
- Publication number 20210013072
- Publication date Jan 14, 2021
- CHINA TRIUMPH INTERNATIONAL ENGINEERING CO., LTD.
- Shou PENG
- H01 - BASIC ELECTRIC ELEMENTS