T. E. Felter

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Alameda County, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method for extreme ultraviolet lithography
- Patent number 6,162,577
- Issue date Dec 19, 2000
- T. E. Felter
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for extreme ultraviolet lithography
- Patent number 6,007,963
- Issue date Dec 28, 1999
- Sandia Corporation
- T. E. Felter
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photoresist composition for extreme ultraviolet lithography
- Patent number 5,989,776
- Issue date Nov 23, 1999
- Sandia Corporation
- T. E. Felter
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY