Takahisa MASE

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Multi-point thermocouples and assemblies for ceramic heating struct...
- Patent number 11,774,298
- Issue date Oct 3, 2023
- Tokyo Electron Limited
- Melvin Verbaas
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for heat-treating substrate
- Patent number 11,488,847
- Issue date Nov 1, 2022
- Tokyo Electron Limited
- Hiroyuki Miyashita
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR HEATING SUBSTRATE AND METHOD THEREOF
- Publication number 20220078888
- Publication date Mar 10, 2022
- TOKYO ELECTRON LIMITED
- Takahisa MASE
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
MULTI-POINT THERMOCOUPLES AND ASSEMBLIES FOR CERAMIC HEATING STRUCT...
- Publication number 20210247240
- Publication date Aug 12, 2021
- TOKYO ELECTRON LIMITED
- Melvin Verbaas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR HEAT-TREATING SUBSTRATE
- Publication number 20210020477
- Publication date Jan 21, 2021
- TOKYO ELECTRON LIMITED
- Hiroyuki MIYASHITA
- H01 - BASIC ELECTRIC ELEMENTS