Takashi Chino

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Yamanashi-ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Conditioning method, computer readable storage medium and substrate...
- Patent number 8,980,366
- Issue date Mar 17, 2015
- Tokyo Electron Limited
- Takashi Chino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of detecting abnormal placement of substrate, substrate proc...
- Patent number 8,581,153
- Issue date Nov 12, 2013
- Tokyo Electron Limited
- Takashi Chino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CONDITIONING METHOD, COMPUTER READABLE STORAGE MEDIUM AND SUBSTRATE...
- Publication number 20120251704
- Publication date Oct 4, 2012
- TOKYO ELECTRON LIMITED
- Takashi CHINO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DETECTING ABNORMAL PLACEMENT OF SUBSTRATE, SUBSTRATE PROC...
- Publication number 20110174800
- Publication date Jul 21, 2011
- TOKYO ELECTRON LIMITED
- Takashi Chino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...