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Takashi KAMO
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Yokohama-shi, JP
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last 30 patents
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Patent Application
EXPOSURE METHOD AND EXPOSURE MASK
Publication number
20130059234
Publication date
Mar 7, 2013
Takashi KAMO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF CORRECTING DEFECTS IN A REFLECTION-TYPE MASK AND MASK-DEF...
Publication number
20120307218
Publication date
Dec 6, 2012
Takashi KAMO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
REFLECTIVE MASK AND METHOD FOR MANUFACTURING THE SAME
Publication number
20120141927
Publication date
Jun 7, 2012
Takashi KAMO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
REFLECTIVE EXPOSURE MASK, METHOD OF FABRICATING REFLECTIVE EXPOSURE...
Publication number
20110151358
Publication date
Jun 23, 2011
Takashi KAMO
B82 - NANO-TECHNOLOGY
Information
Patent Application
REFLECTIVE EXPOSURE MASK, METHOD OF MANUFACTURING REFLECTIVE EXPOSU...
Publication number
20110117479
Publication date
May 19, 2011
RENESAS ELECTRONICS CORPORATION
Osamu SUGA
B82 - NANO-TECHNOLOGY
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Patent Application
REFLECTION-TYPE EXPOSURE MASK AND METHOD OF MANUFACTURING A SEMICON...
Publication number
20110020737
Publication date
Jan 27, 2011
Takashi Kamo
B82 - NANO-TECHNOLOGY
Information
Patent Application
REFLECTIVE-TYPE MASK
Publication number
20090148781
Publication date
Jun 11, 2009
Takashi KAMO
B82 - NANO-TECHNOLOGY
Information
Patent Application
Method of producing mask inspection data, method of manufacturing a...
Publication number
20060206853
Publication date
Sep 14, 2006
Takashi Kamo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY