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Takashi Tsuchiya
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Kitakami-shi, Iwate-ken, JP
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last 30 patents
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Patent Grant
Phase shift mask and method of fabricating the same
Patent number
5,536,603
Issue date
Jul 16, 1996
Kabushiki Kaisha Toshiba
Takashi Tsuchiya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for forming resist pattern
Patent number
5,051,338
Issue date
Sep 24, 1991
Tokyo Shibaura Denki Kabushiki Kaisha
Yoshihide Kato
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of forming resist pattern and resist processing apparatus us...
Patent number
4,946,764
Issue date
Aug 7, 1990
Yasuo Matsuoka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for forming resist pattern
Patent number
4,897,337
Issue date
Jan 30, 1990
Tokyo Shibaura Denki Kabushiki Kaisha
Yoshihide Kato
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pattern developing process and apparatus therefor
Patent number
4,755,442
Issue date
Jul 5, 1988
Kabushiki Kaisha Toshiba
Hiroyuki Hasebe
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Automatic developing device
Patent number
4,755,844
Issue date
Jul 5, 1988
Kabushiki Kaisha Toshiba
Takashi Tsuchiya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for forming resist pattern
Patent number
4,717,645
Issue date
Jan 5, 1988
Tokyo Shibaura Denki Kabushiki Kaisha
Yoshihide Kato
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY