Takashi Tsuchiya

Person

Kitakami-shi, Iwate-ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Phase shift mask and method of fabricating the same
- Patent number 5,536,603
- Issue date Jul 16, 1996
- Kabushiki Kaisha Toshiba
- Takashi Tsuchiya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for forming resist pattern
- Patent number 5,051,338
- Issue date Sep 24, 1991
- Tokyo Shibaura Denki Kabushiki Kaisha
- Yoshihide Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of forming resist pattern and resist processing apparatus us...
- Patent number 4,946,764
- Issue date Aug 7, 1990
- Yasuo Matsuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for forming resist pattern
- Patent number 4,897,337
- Issue date Jan 30, 1990
- Tokyo Shibaura Denki Kabushiki Kaisha
- Yoshihide Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern developing process and apparatus therefor
- Patent number 4,755,442
- Issue date Jul 5, 1988
- Kabushiki Kaisha Toshiba
- Hiroyuki Hasebe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Automatic developing device
- Patent number 4,755,844
- Issue date Jul 5, 1988
- Kabushiki Kaisha Toshiba
- Takashi Tsuchiya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for forming resist pattern
- Patent number 4,717,645
- Issue date Jan 5, 1988
- Tokyo Shibaura Denki Kabushiki Kaisha
- Yoshihide Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Takashi Tsuchiya

Person

Patents Grantslast 30 patents

Phase shift mask and method of fabricating the same

Method and apparatus for forming resist pattern

Method of forming resist pattern and resist processing apparatus us...

Method and apparatus for forming resist pattern

Pattern developing process and apparatus therefor

Automatic developing device

Method and apparatus for forming resist pattern