Takurou USHIDA

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Toyama-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, method for manufacturing semiconduc...
- Patent number 9,816,182
- Issue date Nov 14, 2017
- Hitachi Kokusai Electric Inc.
- Hideto Tateno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...
- Publication number 20150140835
- Publication date May 21, 2015
- Hitachi Kokusai Electric Inc.
- Hideto TATENO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...