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Tatsumi SHIMOMURA
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Kyoto-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Substrate treating apparatus and method of treating substrate
Patent number
9,460,944
Issue date
Oct 4, 2016
SCREEN Holdings Co., Ltd.
Naozumi Fujiwara
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
SUBSTRATE TREATING APPARATUS AND METHOD OF TREATING SUBSTRATE
Publication number
20160005630
Publication date
Jan 7, 2016
SCREEN Holdings Co., Ltd.
Naozumi FUJIWARA
H01 - BASIC ELECTRIC ELEMENTS