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Tom PENG

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  • Hsin-Chu, TW
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    METAL ETCHING WITH IN SITU PLASMA ASHING
    • Publication number 20220336228
    • Publication date Oct 20, 2022
    • TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    • Hsing-Hsiang WANG
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METAL ETCHING WITH IN SITU PLASMA ASHING
    • Publication number 20200176269
    • Publication date Jun 4, 2020
    • TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    • Hsing-Hsiang WANG
    • H01 - BASIC ELECTRIC ELEMENTS