Tomohito Ura

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Koshi City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,276,455
- Issue date Apr 15, 2025
- Tokyo Electron Limited
- Masataka Gosho
- F26 - DRYING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,237,177
- Issue date Feb 25, 2025
- Tokyo Electron Limited
- Shogo Fukui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and rec...
- Patent number 11,084,072
- Issue date Aug 10, 2021
- Tokyo Electron Limited
- Shogo Fukui
- B08 - CLEANING
Information Patent Grant
Liquid processing apparatus
- Patent number 10,665,478
- Issue date May 26, 2020
- Tokyo Electron Limited
- Nobuhiko Mouri
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250167011
- Publication date May 22, 2025
- TOKYO ELECTRON LIMITED
- Shogo Fukui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220254658
- Publication date Aug 11, 2022
- TOKYO ELECTRON LIMITED
- Shogo Fukui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220074660
- Publication date Mar 10, 2022
- TOKYO ELECTRON LIMITED
- Masataka GOSHO
- F26 - DRYING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
- Publication number 20180200764
- Publication date Jul 19, 2018
- TOKYO ELECTRON LIMITED
- Shogo Fukui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS
- Publication number 20170278727
- Publication date Sep 28, 2017
- TOKYO ELECTRON LIMITED
- Nobuhiko Mouri
- B08 - CLEANING