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Yokohama-shi, JP
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last 30 patents
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Patent Grant
Shape measuring apparatus, structure manufacturing system, stage ap...
Patent number
9,733,070
Issue date
Aug 15, 2017
Nikon Corporation
Toru Aramaki
G05 - CONTROLLING REGULATING
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last 30 patents
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Patent Application
SHAPE MEASURING APPARATUS, STRUCTURE MANUFACTURING SYSTEM, STAGE AP...
Publication number
20150260507
Publication date
Sep 17, 2015
Nikon Corporation
TORU ARAMAKI
G01 - MEASURING TESTING