Toshikazu Umatate

Person

Kawasaki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Pattern forming method and method for producing device
- Patent number 8,795,953
- Issue date Aug 5, 2014
- Nikon Corporation
- Toshikazu Umatate
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask substrate, projection exposure apparatus equipped with the mas...
- Patent number 6,040,096
- Issue date Mar 21, 2000
- Nikon Corporation
- Yukio Kakizaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask substrate, projection exposure apparatus equipped with the mas...
- Patent number 5,894,056
- Issue date Apr 13, 1999
- Nikon Corporation
- Yukio Kakizaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography information control system
- Patent number 5,243,377
- Issue date Sep 7, 1993
- Nikon Corporation
- Toshikazu Umatate
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position measuring apparatus
- Patent number 4,958,082
- Issue date Sep 18, 1990
- Nikon Corporation
- Susumu Makinouchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of and apparatus for aligning a substrate
- Patent number 4,833,621
- Issue date May 23, 1989
- Nikon Corporation
- Toshikazu Umatate
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for successive alignment of chip patterns on a substrate
- Patent number 4,780,617
- Issue date Oct 25, 1988
- Nippon Kogaku K.K.
- Toshikazu Umatate
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PATTERN FORMING METHOD AND METHOD FOR PRODUCING DEVICE
- Publication number 20120225388
- Publication date Sep 6, 2012
- Nikon Corporation
- Toshikazu UMATATE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Toshikazu Umatate

Person

Patents Grantslast 30 patents

Pattern forming method and method for producing device

Mask substrate, projection exposure apparatus equipped with the mas...

Mask substrate, projection exposure apparatus equipped with the mas...

Lithography information control system

Position measuring apparatus

Method of and apparatus for aligning a substrate

Method for successive alignment of chip patterns on a substrate

Patents Applicationslast 30 patents

PATTERN FORMING METHOD AND METHOD FOR PRODUCING DEVICE