Toshiki KOBAYASHI

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Tsukui-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for heat treating semiconductors at normal pressure and l...
- Patent number 5,578,132
- Issue date Nov 26, 1996
- Tokyo Electron Kabushiki Kaisha
- Kenichi Yamaga
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20090151638
- Publication date Jun 18, 2009
- TOKYO ELECTRON LIMITED
- Toshiki KOBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...