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Toshio Iida
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Kumamoto, JP
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last 30 patents
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Patent Grant
Ion implanting apparatus for forming ion beam shape
Patent number
7,791,040
Issue date
Sep 7, 2010
NEC Electronics Corporation
Minoru Ikeda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Ion implantation apparatus
Publication number
20090050820
Publication date
Feb 26, 2009
NEC Electronics Corporation
Minoru Ikeda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Wafer transfer apparatus, wafer gripper, and wafer gripper guide us...
Publication number
20060181098
Publication date
Aug 17, 2006
NEC Electronics Corporation
Toshio Iida
H01 - BASIC ELECTRIC ELEMENTS