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Vladimir J. Zeitlin
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Santa Clara, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
System and method for thermal processing of a semiconductor substrate
Patent number
6,403,925
Issue date
Jun 11, 2002
Mattson Technology, Inc.
Kristian E. Johnsgard
C30 - CRYSTAL GROWTH
Information
Patent Grant
System and method for thermal processing of a semiconductor substrate
Patent number
6,399,921
Issue date
Jun 4, 2002
Mattson Technology, Inc.
Kristian E. Johnsgard
C30 - CRYSTAL GROWTH
Information
Patent Grant
System and method for thermal processing of a semiconductor substrate
Patent number
6,172,337
Issue date
Jan 9, 2001
Mattson Technology, Inc.
Kristian E. Johnsgard
C30 - CRYSTAL GROWTH
Information
Patent Grant
System and method for thermal processing of a semiconductor substrate
Patent number
6,046,439
Issue date
Apr 4, 2000
Mattson Technology, Inc.
Kristian E. Johnsgard
C30 - CRYSTAL GROWTH
Information
Patent Grant
System and method for thermal processing of a semiconductor substrate
Patent number
6,043,460
Issue date
Mar 28, 2000
Mattson Technology, Inc.
Kristian E. Johnsgard
C30 - CRYSTAL GROWTH
Information
Patent Grant
System and method for thermal processing of a semiconductor substrate
Patent number
6,002,109
Issue date
Dec 14, 1999
Mattson Technology, Inc.
Kristian E. Johnsgard
C30 - CRYSTAL GROWTH
Information
Patent Grant
Magnetic field-enhanced plasma etch reactor
Patent number
5,215,619
Issue date
Jun 1, 1993
Applied Materials, Inc.
David Cheng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Magnetic field-enhanced plasma etch reactor
Patent number
4,842,683
Issue date
Jun 27, 1989
Applied Materials, Inc.
David Cheng
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
SYSTEM AND METHOD FOR THERMAL PROCESSING OF A SEMICONDUCTOR SUBSTRATE
Publication number
20020047004
Publication date
Apr 25, 2002
Kristian E. Johnsgard
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...