Vladimir Mihailovitch Krivtsum

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Troitsk, RU

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Patents Grantslast 30 patents

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Radiation generating device, lithographic apparatus, device manufac...
- Patent number 7,208,746
- Issue date Apr 24, 2007
- ASML Netherlands B.V.
- Konstantin Nikolaevitch Koshelev
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR