Wakako Suganuma

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Tokyo-to, JP

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and methods for patterning a reticle blank by electron-be...
- Patent number 6,972,417
- Issue date Dec 6, 2005
- Nikon Corporation
- Wakako Suganuma
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Methods for determining focus and astigmatism in charged-particle-b...
- Publication number 20030043358
- Publication date Mar 6, 2003
- NIKON CORPORATION
- Wakako Suganuma
- B82 - NANO-TECHNOLOGY
Information Patent Application
Apparatus and methods for patterning a reticle blank by electron-be...
- Publication number 20020012853
- Publication date Jan 31, 2002
- NIKON CORPORATION
- Wakako Suganuma
- B82 - NANO-TECHNOLOGY